Hybrid documents with electronic indicia

A method of making a hybrid document, comprising:

• providing a flexible document having visible markings;
• providing a light-emitting diode source wafer having a plurality of relatively rigid printable inorganic light-emitting diodes connected to the light-emitting diode source wafer by light-emitting diode tethers that protrude from and are attached to a side of the inorganic light-emitting diodes;
• providing a controller source wafer having a plurality of controllers each comprising an integrated circuit that is more rigid than the flexible document connected to the controller source wafer by controller tethers that protrude from and are attached to a side of the controllers;
• providing a component substrate connected to a component source wafer with a component tether protruding from and attached to a side of the component substrate, wherein the component substrate is separate from and more rigid than the flexible document;
• printing at least a portion of at least one of the plurality of controllers and one or more of the plurality of inorganic light-emitting diodes from the controller source wafer and the light-emitting diode source wafer, respectively, to the component substrate, thereby fracturing or separating each light-emitting diode tether that connected the one or more of the plurality of inorganic light-emitting diodes to the light-emitting diode source wafer and each controller tether that connected the at least one of the plurality of controllers to the controller source wafer to provide a component;
• disposing on the component substrate (i) a piezoelectric power source activated by pressure or movement that generates charge and has an area no greater than 0.5 cm2 and (ii) a power convertor to convert the power provided from the power input connection to a form that usable by at least one of the controller and the inorganic light-emitting diodes, the power convertor comprising a capacitor;
• printing the component in or on the flexible document or in or on a ribbon or thread, thereby embedding the component in or on the flexible document or in or on the ribbon or thread and fracturing or separating the component tether;
• and
• electrically connecting the at least one of the plurality of controllers to the one or more of the plurality of inorganic light-emitting diodes and to a power input connection and connecting the power source and the power converter to the power input connection using photolithographic methods and materials,
• wherein the controller or the one or more light-emitting diodes or both have a length or a width no greater than 50 microns and less than a length or width of the flexible document.