Temperature adjusting device, electronic component handling apparatus, and electronic component test apparatus
AssigneeAdvantest Corporation
InventorsYuya Yamada, Aritomo Kikuchi, Yasuyuki Kato
Life of this patent
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AssigneeAdvantest Corporation
InventorsYuya Yamada, Aritomo Kikuchi, Yasuyuki Kato
Estimating the term…
A temperature adjusting device includes: a fluid connector connected to a fluid supply source; a heat exchanger thermally connected to a DUT or a carrier holding the DUT being pressed against a socket; a first flow path passing through an inside of the heat exchanger; a first swirl flow forming part that supplies a first swirl flow to the first flow path, the first swirl flow swirling along an inner surface of the first flow path around a first central axis of the first flow path; and a second flow path disposed on an upstream side of the first flow path and connected to the first flow path. The second flow path has a second central axis not intersecting the first central axis, and the first swirl flow forming part is a first connection part where the first and second flow paths are connected to each other.
A temperature adjusting device that adjusts a temperature of a device under test (DUT) electrically connected to a socket, the temperature adjusting device comprising:
Dependencies are inferred from the claim text.