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US 12,436,049 B2Granted
Sensor die with a diaphragm
OwnerJeffrey C. Fong, Daniel T. O'Brieninventors
Life of this patent
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Abstract
A sensor die includes a diaphragm having a first membrane and a second membrane positioned within the first membrane. The first membrane is deflectable in proportion with a differential pressure between a first side of the diaphragm and a second side of the diaphragm opposite the first side. The second membrane is deflectable simultaneously with the first membrane and in proportion with an absolute pressure on the first side of the diaphragm.
Claims19
A sensor die, comprising:
- a diaphragm having a first membrane and a second membrane positioned within the first membrane, the first membrane is deflectable in proportion with a differential pressure between a first side of the diaphragm and a second side of the diaphragm opposite the first side, the second membrane is deflectable simultaneously with the first membrane and in proportion with an absolute pressure on the first side of the diaphragm, the diaphragm includes a first layer and a second layer disposed on the first layer, the first membrane is formed of the first layer and the second layer, and the second membrane is formed of the second layer, the first layer has a diaphragm cavity extending into the first layer, the first layer includes a silicon and an oxide disposed on the silicon, the diaphragm cavity is formed in the oxide of the first layer.
A process of manufacturing a sensor die, comprising:
- providing a first layer of a diaphragm;
- etching a diaphragm cavity into the first layer;
- and
- attaching a second layer of the diaphragm on the first layer, a portion of the first layer and the second layer outside of the diaphragm cavity forms a first membrane and a portion of the second layer extending over the diaphragm cavity forms a second membrane positioned within the first membrane, the first membrane is deflectable in proportion with a differential pressure between a first side of the diaphragm and a second side of the diaphragm opposite the first side, the second membrane is deflectable simultaneously with the first membrane and in proportion with an absolute pressure on the first side of the diaphragm.
1 more element
A sensor assembly, comprising:
- a sensor die including a diaphragm having a first membrane and a second membrane positioned within the first membrane, the first membrane is deflectable in proportion with a differential pressure between a first side of the diaphragm and a second side of the diaphragm opposite the first side, the second membrane is deflectable simultaneously with the first membrane and in proportion with an absolute pressure on the first side of the diaphragm;
- and
- a controller connected to the sensor die and receiving the differential pressure and the absolute pressure from the sensor die, the controller executes a compensation algorithm based on the differential pressure to correct an error in the absolute pressure.
A sensor die, comprising:
- a diaphragm having a first membrane and a second membrane positioned within the first membrane, the first membrane is deflectable in proportion with a differential pressure between a first side of the diaphragm and a second side of the diaphragm opposite the first side, the second membrane is deflectable simultaneously with the first membrane and in proportion with an absolute pressure on the first side of the diaphragm, the first membrane has a recess extending into the first side of the diaphragm, the recess is separated from the second membrane.
Dependencies are inferred from the claim text.