Method and apparatus for manufacturing defect-free monocrystalline silicon crystal
AssigneeSumco Corporation
InventorsKeiichi Takanashi, Ippei Shimozaki
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AssigneeSumco Corporation
InventorsKeiichi Takanashi, Ippei Shimozaki
Estimating the term…
A crystal puller apparatus comprises a pulling assembly to pull a crystal from a silicon melt at a pull speed; a crucible that contains the silicon melt; a heat shield above a surface of the silicon melt; a lifter to change a gap between the heat shield and the surface of the silicon melt; and one or more computing devices to determine an adjustment to the gap using a Pv-Pi margin, at a given length of the crystal, in response to a change in the pull speed. The computer-implemented method by a computing device comprises determining a pull-speed command signal to control a diameter of the crystal; determining a lifter command signal to control a gap between a heat shield and a surface of a silicon melt from which the crystal is grown; and determining an adjustment to the gap, in response to a different pull-speed, using a Pv-Pi margin.
A method of growing a silicon crystal, comprising:
Dependencies are inferred from the claim text.