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US 12,434,349 B2Granted
Surface treatment method
AssigneeSintokogio, Ltd.
InventorsFumiaki Kumeno, Hayato Taniguchi
Life of this patent
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Abstract
A surface treatment method includes a step of irradiating a workpiece with a pulsed laser beam through a transparent liquid and a step of causing particles to collide with a heat-affected layer developed on a surface layer portion of the workpiece in the step of irradiating. The particles each has a core made of an elastic body and abrasive grains provided on a surface of the core.
Claims14
A surface treatment method comprising:
- a step of irradiating a workpiece with a pulsed laser beam through a transparent liquid;
- and
- a step of causing particles each having a core made of an elastic body and abrasive grains provided on a surface of the core to collide with a heat-affected layer developed on a surface layer portion of the workpiece in the step of irradiation, wherein
- the step of causing collision includes:
- causing the particles to collide with a surface of the workpiece from an oblique direction to grow a microcrack in a direction along the surface of the workpiece;
- and
- causing the particles to collide with the microcrack of the heat-affected layer to remove the heat-affected layer using the microcrack as a starting point.
4 more elements
Dependencies are inferred from the claim text.