Processing machine, processing system, and method for manufacturing processed object

A processing machine comprising:

• a first moving part configured to support a first one of a workpiece and a tool via a third moving part;
• a first guide configured to guide the first moving part in a first direction with respect to a base;
• a first drive source configured to drive the first moving part in the first direction with respect to the base;
• a first sensor configured to output a signal corresponding to a first displacement comprising a displacement of the first moving part in the first direction with respect to the base and a first error comprising a displacement of the first moving part in a second direction orthogonal to the first direction with respect to the base;
• a second moving part configured to support a second one of the workpiece and the tool;
• a second guide configured to guide the second moving part in the second direction with respect to the base;
• a second drive source configured to drive the second moving part in the second direction with respect to the base;
• a second sensor configured to output a signal corresponding to a second displacement comprising a displacement of the second moving part in the second direction with respect to the base;
• a third guide configured to guide the third moving part in a third direction orthogonal to both the first and second directions with respect to the first moving part;
• a third drive source configured to drive the third moving part in the third direction with respect to the first moving part;
• and
• a control device comprising a processor and a non-transitory memory, the control device configured to control the first drive source, the second drive source, and the third drive source according to a program which includes information about instructions relating to movement of the first moving part, the second moving part and the third drive source, wherein
• the non-transitory memory comprises instructions that, when executed by the processor, cause the processor to perform processing providing:
• an interpolation unit configured to compute, based on the information of the program, a first target position for the first moving part in the first direction for each predetermined control cycle, a second target position for the second moving part in the second direction for each predetermined control cycle and a third target position for the third moving part in the third direction for each predetermined control cycle,
• a first control unit configured to acquire, in each control cycle, a detection value of the first displacement which is up-close based on the signal from the first sensor, compute a first deviation based on a difference between the detection value acquired and the first target position, and control the first drive source so that the first deviation is reduced,
• a second control unit configured to acquire, in each control cycle, a detection value of the second displacement which is up-close based on the signal from the second sensor, compute a second deviation based on a difference between the detection value acquired and the second target position, and control the second drive source so that the second deviation is reduced, and
• a third control unit configured to control, in each control cycle, the third drive source based on a detection position of the third moving part and the third target position, and
• the second control unit is configured to acquire, in each control cycle, a detection value of the first error which is up-close based on the signal from the first sensor, and increase or reduce the second deviation based on the detection value of the first error, without consideration of a detection value of a third error comprising a displacement of the third moving part in the second direction with respect to the first moving part which is up-close, so that at least a portion of an error in a relative position of the workpiece and the tool in the second direction originating from the first error is cancelled by movement of the second moving part in the second direction.