Piezoelectric element, droplet dispensing head, actuator, and vibrator
AssigneeSeiko Epson Corporation
InventorsKazuya Kitada, Koji Ohashi, Yasuaki Hamada, Yoshiki Yano
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AssigneeSeiko Epson Corporation
InventorsKazuya Kitada, Koji Ohashi, Yasuaki Hamada, Yoshiki Yano
Estimating the term…
A piezoelectric element includes: a first electrode formed at a vibration plate; a seed layer formed at the first electrode; a piezoelectric film containing potassium, sodium, and niobium and formed at the seed layer; and a second electrode formed at the piezoelectric film. The piezoelectric film contains lithium and one or more first transition elements. The seed layer contains bismuth. When the piezoelectric film is divided into two equal parts in a stacking direction, the second electrode side is defined as a first region, and the first electrode side is defined as a second region, a bismuth intensity obtained by SIMS measurement at a boundary between the first region and the second region is equal to or less than 1/500 of a maximum bismuth intensity obtained by the SIMS measurement of the piezoelectric film.
A piezoelectric element comprising:
Dependencies are inferred from the claim text.