Resonant structure in micro electro mechanical systems

A resonant structure in micro electro mechanical systems, comprising:

• a main body having a major axis, wherein the main body includes an induction portion and a support portion connected to the induction portion along the major axis, the induction portion has at least one first induction side surface that is not parallel to the major axis, and the main body has a plurality of first protruding teeth on the at least one first induction side surface;
• and
• at least one electrode disposed on one side of the induction portion and spaced apart from the induction portion, wherein the at least one electrode has a second induction side surface, and the second induction side surface corresponds in position to the at least one first induction side surface and is not parallel to the major axis, wherein the at least one electrode has a plurality of second protruding teeth on the second induction side surface, and the second protruding teeth and the first protruding teeth are interlaced and not in contact with each other, and wherein, when a separation distance between the at least one first induction side surface and the second induction side surface is changed, a plurality of surfaces of the first protruding teeth and a plurality of surfaces of the second protruding teeth are configured to produce a capacitance change;
• wherein the main body has a first groove between any two adjacent ones of the first protruding teeth, and the first groove corresponds in position and shape to an adjacent one of the second protruding teeth, wherein the at least one electrode has a second groove between any two adjacent ones of the second protruding teeth, and the second groove corresponds in position and shape to an adjacent one of the first protruding teeth, and wherein one of a plurality of traveling lengths is defined between the first groove and one of the second protruding teeth, another one of the traveling lengths is defined between the second groove and one of the first protruding teeth, and the traveling lengths are gradually increased along the major axis in a direction away from the support portion.

A resonant structure in micro electro mechanical systems, comprising:

• a main body having a major axis, wherein the main body includes an induction portion and a support portion connected to the induction portion along the major axis, the induction portion has at least one first induction side surface that is not parallel to the major axis, and the main body has a plurality of first protruding teeth on the at least one first induction side surface;
• and
• at least one electrode disposed on one side of the induction portion and spaced apart from the induction portion, wherein the at least one electrode has a second induction side surface, and the second induction side surface corresponds in position to the at least one first induction side surface and is not parallel to the major axis, wherein the at least one electrode has a plurality of second protruding teeth on the second induction side surface, and the second protruding teeth and the first protruding teeth are interlaced and not in contact with each other, and wherein, when a separation distance between the at least one first induction side surface and the second induction side surface is changed, a plurality of surfaces of the first protruding teeth and a plurality of surfaces of the second protruding teeth are configured to produce a capacitance change;
• wherein a plurality of tip angles of the first protruding teeth and a plurality of tip angles of the second protruding teeth are gradually decreased along the major axis in a direction away from the support portion.