Methods of monitoring gas byproducts of a bonding system, and related monitoring systems and bonding systems
AssigneeKulicke and Soffa Industries, Inc.
InventorsMatthew B. Wasserman, Thomas J. Colosimo, Jr.
Life of this patent
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Abstract
A method of monitoring gas byproducts of a bonding system is provided. The method includes: providing a plurality of bonding systems, each of the bonding systems including a reducing gas delivery system for use in connection with a bonding operation, each of the bonding systems being configured for exhausting gas byproducts; connecting each of the bonding systems to a monitoring device using a respective gas delivery path; and monitoring a composition of at least a portion of the gas byproducts with the monitoring device.
Claims26
A method of monitoring gas byproducts of a bonding system, the method comprising the steps of:
- (a) providing a plurality of bonding systems, each of the bonding systems including a reducing gas delivery system for use in connection with a bonding operation, each of the bonding systems being configured for exhausting gas byproducts;
- (b) connecting each of the bonding systems to a monitoring device using a respective gas delivery path, the gas delivery path between each of the plurality of bonding systems and the monitoring device including a valve such that the monitoring device is configured to selectively monitor a composition of at least a portion of the gas byproducts with the monitoring device with respect to any one of the bonding systems;
- and
- (c) monitoring the composition of at least a portion of the gas byproducts with the monitoring device.
A monitoring system for monitoring gas byproducts of a plurality of bonding systems, the monitoring system comprising:
- a plurality of bonding systems, each of the bonding systems including a reducing gas delivery system for use in connection with a bonding operation, each of the bonding systems being configured for exhausting gas byproducts;
- a monitoring device for monitoring a composition of at least a portion of the gas byproducts;
- and
- a plurality of connecting structures, each of the connecting structures providing a gas delivery path between a respective one of the plurality of bonding systems and the monitoring device, the respective gas delivery path between each of the plurality of bonding systems and the monitoring device including a valve such that the monitoring device is configured to selectively monitor the composition with respect to any one of the bonding systems.
A method of monitoring gas byproducts of a bonding system, the method comprising the steps of:
- (a) providing a plurality of bonding systems, each of the bonding systems including a reducing gas delivery system for use in connection with a bonding operation, each of the bonding systems being configured for exhausting gas byproducts, each of the bonding systems including an abatement system, the gas byproducts including an exhaust from the abatement system;
- (b) connecting each of the bonding systems to a monitoring device using a respective gas delivery path;
- (c) monitoring a composition of at least a portion of the gas byproducts with the monitoring device;
- and
- (d) transferring a reducing gas from a bonding area of one of the bonding systems to the abatement system of the one of the bonding systems using a vacuum system of the one of the bonding systems, the vacuum system being integrated with a bond head assembly or a support structure of the one of the bonding systems.
A monitoring system for monitoring gas byproducts of a plurality of bonding systems, the monitoring system comprising:
- a plurality of bonding systems, each of the bonding systems including a reducing gas delivery system for use in connection with a bonding operation, each of the bonding systems being configured for exhausting gas byproducts, each of the bonding systems being configured to transfer a reducing gas from a bonding area of the bonding system to an abatement system of the bonding system using a vacuum system of the bonding system, the vacuum system being integrated with a bond head assembly or a support structure of the bonding system, the gas byproducts including an exhaust from the abatement system;
- a monitoring device for monitoring a composition of at least a portion of the gas byproducts;
- and
- a plurality of connecting structures, each of the connecting structures providing a gas delivery path between a respective one of the plurality of bonding systems and the monitoring device.
Dependencies are inferred from the claim text.