Apparatus for arcing diagnosis, plasma process equipment including the same, and arcing diagnosis method

An apparatus comprising:

• a first voltage-current sensor disposed in a power filter connected to a heater or on a power supply line connected to the heater, the heater being disposed in a lower electrode of a process chamber in which a plasma process is performed and the first voltage-current sensor configured to sense a harmonic generated from a first power supply that supplies alternating current power to the heater and to output a first signal;
• an optical sensor disposed on one side of the process chamber and configured to sense an intensity of light generated from the process chamber and to output a second signal;
• a second voltage-current sensor disposed on a power supply line connected to an upper electrode of the process chamber, and configured to sense a harmonic generated from a second power supply supplying alternating current power to the upper electrode and to output a third signal;
• and
• an arcing detector circuit configured to determine whether arcing occurs in the process chamber based on at least one of the first signal, the second signal, or the third signal.