Helical voltage standoff
AssigneeApplied Materials, Inc.
InventorsDiana C. Gronski, Alicia Chen, Craig R. Chaney, Adam M. McLaughlin
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Abstract
An insulator that has a helical protrusion spiraling around the shaft is disclosed. A lip is disposed on the distal end of the helical protrusion, creating regions on the shaft that are shielded from material deposition by the lip. By proper sizing of the threads, the helical protrusion and the lip, the line-of-sight to the interior wall of the shaft can be greatly reduced. This results in longer times before failure. This insulator may be used in an ion implantation system to physically and electrically separate two components.
Claims19
An insulator, comprising:
- a shaft having a first end and a second end;
- and
- a helical protrusion spiraling around the shaft, wherein the helical protrusion comprises a lip disposed at its distal end extending toward the second end.
An insulator, comprising:
- a shaft having a first end and a second end;
- a helical protrusion spiraling around the shaft;
- and
- a sheath extending outward from the shaft and surrounding a portion of the shaft, wherein a sheath helical protrusion is disposed on an interior surface of the sheath facing the shaft;
- wherein at least one of the helical protrusion or the sheath helical protrusion comprises a lip disposed at its distal end.
Dependencies are inferred from the claim text.