Stroboscopic electron-beam signal image mapping

A system, comprising:

• a probe to provide a modulated electrical test signal to an integrated circuit structure of a die, wherein the modulated electrical test signal has a first frequency;
• an electron-beam (e-beam) column to apply a pulsed electron beam to the integrated circuit structure, wherein the pulsed beam comprises one of a frequency delta relative to the first frequency or a number of packets of beam pulses at the first frequency within each packet;
• a detector to detect an imaging signal from the integrated circuit structure at a detector, wherein the frequency delta or the packets of beam pulses establishes a modulation of the imaging signal at a second frequency less than the first frequency and distinguishable by the detector;
• and
• a lock-in amplifier or spectrum analyzer tuned to the second frequency.

A system, comprising:

• a memory to store a data structure corresponding to a modulated electrical test signal;
• and
• processor circuitry coupled to the memory, the processor circuitry to:
• control a probe to provide the modulated electrical test signal to an integrated circuit structure of a die, wherein the modulated electrical test signal has a first frequency;
• control a beam column to apply a pulsed beam to the integrated circuit structure, wherein the pulsed beam comprises one of a frequency delta relative to the first frequency or a number of packets of beam pulses at the first frequency within each packet;
• receive an imaging signal from the integrated circuit structure at a detector, wherein the frequency delta or the packets of beam pulses establishes a modulation of the imaging signal at a second frequency less than the first frequency;
• and
• generate an image based on the imaging signal.