Charged particle beam device and image acquisition method

A charged particle beam device that acquires an image by scanning a specimen with a probe formed from a charged particle beam and detecting a signal emitted from the specimen, the charged particle beam device comprising:

• an optical system that forms the probe from the charged particle beam and scans the specimen using the probe;
• a control unit that repeatedly performs correction processing for correcting shifting of an irradiation position of the probe on the specimen and image acquisition processing for acquiring a frame image by causing the optical system to scan an observation region of the specimen using the probe;
• and
• an image processing unit that generates an image of the specimen based on a plurality of the frame images,
• wherein, in the correction processing, the control unit acquires a reference image by causing the optical system to scan the observation region using the probe, and corrects the shifting of the irradiation position of the probe based on a position shift amount between a base image and the reference image, and
• the image processing unit aquires position shift information relating to a position shift between the base image and the reference image, corrects a position shift between the frame images based on the position shift information, and generates the image of the specimen based on the plurality of corrected frame images.