Systems and methods for adaptive troubleshooting of semiconductor manufacturing equipment

A system comprising:

• a memory;
• and
• a processing device, operatively coupled to the memory, to perform operations comprising:
• obtaining, by a processor, a plurality of sensor values associated with a deposition process performed, according to a recipe, in a process chamber to deposit film on a surface of a substrate;
• applying a machine-learning model to the plurality of sensor values, the machine-learning model trained based on historical sensor data of a sub-system of the process chamber and task data associated with the recipe for depositing the film;
• generating an output of the machine-learning model, wherein the output is indicative of a suspected failure of the sub-system;
• generating a ticket for the suspected failure;
• and
• storing, in a data structure, the ticket to be accessible via a user interface presenting a manufacturing data graph.

A non-transitory computer-readable storage medium comprising instructions that, when executed by a processing device operatively coupled to a memory, performs operations comprising:

• obtaining, by a processor, a plurality of sensor values associated with a deposition process performed, according to a recipe, in a process chamber to deposit film on a surface of a substrate;
• applying a machine-learning model to the plurality of sensor values, the machine-learning model trained based on historical sensor data of a sub-system of the process chamber and task data associated with the recipe for depositing the film;
• generating an output of the machine-learning model, wherein the output is indicative of a suspected failure of the sub-system;
• generating a ticket for the suspected failure;
• and
• storing, in a data structure, the ticket to be accessible via a user interface presenting a manufacturing data graph.