Dielectric characteristic measurement method and dielectric characteristic measurement system using open resonator

A dielectric characteristic measurement method for measuring dielectric characteristic of a sample using an open resonator while adjusting a position of the sample, the method comprising:

• a step of obtaining first resonance characteristic in a state that the sample is not mounted on the open resonator;
• a step of mounting the sample on the open resonator and adjusting the position of the sample;
• a step of obtaining second resonance characteristic in a state that the position of the sample is adjusted;
• and
• a step of calculating the dielectric characteristic of the sample based on the first resonance characteristic and the second resonance characteristic, wherein
• the step of adjusting the position of the sample includes:
• a first measurement step for performing a first resonance measurement by sweeping a predetermined sweep frequency range at a first number of measurement points;
• and
• a second and subsequent measurement steps for performing a plurality times of resonance measurement following the first resonance measurement,
• each of the plurality times of resonance measurement is performed by sweeping a sweep frequency range specified based on an immediately preceding resonance measurement at a second number of the measurement points which is less than the first number of the measurement points, and
• the sweep frequency range of a second resonance measurement in the plurality times of resonance measurement is specified based on the first resonance measurement.