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US 12,429,420 B2Granted
Gas analysis apparatus and gas analysis method
AssigneeHORIBA STEC, Co., Ltd.
InventorsMotonobu Takahashi, Sotaro Kishida, Akira Kuwahara, Takeshi Akamatsu, Yuhei Sakaguchi, Masakazu Minami
Life of this patent
Estimating the term…
Abstract
Provided are a gas cell into which a gas is introduced, a temperature control block configured to control a temperature of the gas cell, and a pressure sensor configured to measure a pressure inside the gas cell. The pressure sensor is built into the temperature control block and/or the gas cell.
Claims8
A gas analysis apparatus comprising:
- a gas cell into which a gas is introduced;
- a light irradiator configured to emit light into the gas cell;
- a photodetector configured to detect the light having passed through the gas cell;
- a temperature control block provided around the gas cell and configured to control a temperature of the gas cell;
- a pressure sensor configured to measure a pressure inside the gas cell and includes a sensor body that includes a pressure-sensitive element;
- and
- a flange member fixed to an attaching portion that is formed on the temperature control block and the forming wall of the gas cell, in a manner communicating with the gas cell,
- wherein the sensor body is fixed, by the flange member, to the attaching portion on the forming wall of the gas cell, and has a temperature controlled by the temperature control block via the flange member.
5 more elements
A gas analysis method, comprising:
- performing a gas analysis using a gas analysis apparatus, wherein the gas analysis apparatus includes:
- a gas cell into which a gas is introduced,
- a light irradiator configured to emit light into the gas cell,
- a photodetector configured to detect the light having passed through the gas cell,
- a temperature control block provided around the gas cell and configured to control a temperature of the gas cell, and
- a pressure sensor configured to measure a pressure inside the gas cell and includes a sensor body that includes a pressure-sensitive element,
- wherein the sensor body is fixed, by a flange member, to the attaching portion on a forming wall of the gas cell, and has a temperature controlled by the temperature control block via the flange member.
4 more elements
Dependencies are inferred from the claim text.