US 12,429,389 B2 · Multi-parameter sensing system

Abstract

The present application discloses a strain sensing film, a pressure sensor, and a strain sensing system; the strain sensing film includes a semiconductor film, and by arranging a temperature sensor in the semiconductor film, the sensitivity of the strain sensing film is adjusted according to an effective gauge factor obtained from a calibration test and a correlation table reflecting a correlation between an effective gauge factor and a temperature, a better effective gauge factor compensation is achieved, a high sensitivity of the strain gauge of the semiconductor film can be fully utilized. The strain sensing film can be widely used in application scenarios that need to measure local strain or strain variation, force or force variation, pressure or pressure change, displacement, deformation, bending, or bending deformation.

Claims18

Dependent claims

A strain sensing film, comprising:

a semiconductor film, wherein a temperature sensor is arranged in the semiconductor film,
wherein the strain sensing film is provided therein with a signal processing circuit configured for receiving a detected temperature signal output by the temperature sensor and configured for determining a sensitivity adjustment for a sensor according to a correlation table that reflects a correlation between an effective gauge factor and a temperature;
and
the temperature sensor is configured to compensate for a resistance change caused by a temperature change in a deformation region.

1 more element

Dependencies are inferred from the claim text.

Multi-parameter sensing system

Life of this patent

Multi-parameter sensing system

Life of this patent

Abstract

Claims18