Specimen machining device and specimen machining method

A specimen machining device for machining a specimen by irradiating the specimen with an ion beam, the device comprising:

• an ion source that irradiates the specimen with the ion beam;
• a specimen stage that holds the specimen;
• an illumination system that illuminates the specimen under a machine control illumination condition and under a display illumination condition that is different from the machining control illumination condition;
• a camera that photographs the specimen;
• a display unit on which an image of the specimen photographed by the camera is displayed;
• and
• a processing unit that controls the illumination system and the camera, and acquires a machining control image that is used for controlling the ion source and a display image that is displayed on the display unit,
• the processing unit performing processing for:
• controlling the illumination system to illuminate the specimen under the machining control illumination condition;
• acquiring the machining control image by controlling the camera to photograph the specimen illuminated under the machining control illumination condition;
• controlling the ion source based on the machining control image;
• controlling the illumination system to illuminate the specimen under the display illumination condition that is different from the machining control illumination condition;
• acquiring the display image by controlling the camera to photograph the specimen illuminated under the display illumination condition;
• displaying the display image on the display unit;
• and
• repeating processing for acquiring the machining control image,
• wherein the processing unit further performs processing for:
• detecting a region of which change is large from among repeatedly acquired machining control images, and
• magnifying a region of the display image positionally corresponding to the detected region of which change is large, and displaying the magnified image on the display unit.