Ultraviolet radiation apparatus

An ultraviolet radiation apparatus mainly having a ultraviolet light source device comprising:

• glass enclosures,
• wherein the glass enclosures each have the front surface side serving as light emitting surfaces and the rear surface side on the opposite side of the front surface side and have a phosphor layer therein, the phosphor layer being configured to emit ultraviolet light in a deep ultraviolet light region,
• wherein the glass enclosures each enclose a discharge gas that excites the phosphor layer to generate vacuum ultraviolet light;
• a pair of electrodes having a pattern in which the electrodes are configured to be on the opposite side of the rear surface side of the glass enclosures and to spread toward both sides of a clearance functioning as a discharge gap interposed between the electrodes;
• and
• an optical filter placed in front of the light emitting surfaces of the ultraviolet light source device and limiting emission wavelengths on the long wavelength side of an emission spectrum of the phosphor layer,
• wherein each of the glass enclosures is made of borosilicate-based UV-transmitting glass and has a thickness of 70 μm or more at the front surface side of the glass enclosures in such a way as to selectively limit, on the short wavelength side of the emission spectrum, the emission of ultraviolet light including vacuum ultraviolet light generated inside the ultraviolet light source device due to the thickness at the front surface side of the glass enclosures.

An ultraviolet radiation apparatus having a gas-discharging tube array mainly comprising glass tubules having the front surface side serving as light emitting surfaces and the rear surface side on the opposite side of the front surface side,

• wherein the glass tubules each have a deep ultraviolet phosphor layer provided on an inner surface thereof on the rear surface side of the glass tubules and enclose a discharge gas therein;
• wherein the gas-discharging tube array comprises gas-discharging tubes arranged in parallel with each other and a pair of electrodes,
• wherein the pair of electrodes having a pattern in which the electrodes are configured to be on the opposite side of the rear surface side of the gas-discharging tube array and to spread toward both sides of an electrode slit functioning as a discharge gap interposed between the electrodes and shared by the gas-discharging tubes;
• wherein the gas-discharging tubes each have an optical filter placed in front of the gas-discharging tubes on the front surface side;
• wherein the optical filter is provided with a diffraction grating on the incident surface side to substantially block the transmission of ultraviolet rays of 240 nm or more of an emission spectrum of the phosphor layer;
• and
• wherein each of the glass tubules is made of glass having a thickness of 70 μm or more.