Sprayed coating, method for manufacturing sprayed coating, sprayed member and spraying material
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsRyo Iwasaki, Noriaki Hamaya, Yasushi Takai, Hajime Nakano
Life of this patent
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Abstract
A sprayed coating having a multilayer structure including a lower layer made a sprayed coating containing a rare earth oxide, and a surface layer made of another sprayed coating containing a rare earth fluoride and/or a rare earth oxyfluoride, the multilayered sprayed coating having a volume resistivity at 23° C. and a volume resistivity at 200° C., the volume resistivity at 23° C. being 1×109 to 1×1012 Ω·cm, and a temperature index of the volume resistivities defined by the ratio of the volume resistivity at 200° C. to the volume resistivity at 23° C. being 0.1 to 10.
Claims1
An RF3 powder having an average value of roundnesses (an average roundness) of at least 0.9 represented by the following expression (1):
- (Roundness)=(Circumferential length of an assumed circle having the equivalent area in planar view to an area of an observed particle)/(Circumferential length of the observed particle in planar view) (1),
- R being at least one element selected from rare earth elements inclusive of Y and Sc,
- a BET specific surface area of at least 0.1 m2/g and up to 2 m2/g,
- an average particle size (volume basis D50) of 2 to 6 μm,
- a particle hardness of 7 to 12 GPa as measured by nanoindentation method, and
- a pore volume of up to 0.5 cm3/g measured in the range of a diameter of up to 10 μm by mercury porosimetry.
Dependencies are inferred from the claim text.