In-plane and out-of-plane accelerometer

A microelectromechanical accelerometer comprising:

• at least one proof mass in a device layer that defines an xy-plane and a z-direction that is perpendicular to the xy-plane, with the at least one proof mass including a plurality of rotor combs that extend in an x-direction of the xy-plane;
• four fixed sets of stator combs that extend in the x-direction and that are each electrically insulated from the other sets of stator combs, and each set of stator combs is interdigitated with rotor combs, such that the four sets of stator combs form a set of four measurement capacitors together with the rotor combs of the at least one proof mass;
• wherein the at least one proof mass is configured to move at least in a y-direction of the xy-plane and the z-direction relative to the four sets of stator combs,
• wherein the set of four measurement capacitors comprises first, second, third and fourth pairs,
• wherein a position of the rotor combs has a positive offset in the y-direction in relation to stator combs in the first pair when the at least one proof mass is in a rest position, such that respective capacitances increase in the first pair when the at least one proof mass moves away from the rest position in a positive y-direction and decrease when the at least one proof mass moves away from the rest position in a negative y-direction,
• wherein the position of the rotor combs has a negative offset in the y-direction in relation to the stator combs in the second pair when the at least one mass is in the rest position, such that respective capacitances decrease in the second pair when the at least one proof mass moves away from the rest position in the positive y-direction and increase when the at least one proof mass moves away from the rest position in the negative y-direction,
• wherein the position of the rotor combs has a negative offset in the z-direction in relation to the stator combs in the third pair when the at least one proof mass is in a respective rest position, such that respective capacitances decrease in the third pair when the at least one proof mass moves away from the rest position in a negative z-direction, and increase or remain constant when the at least one proof mass moves away from the rest position in a positive z-direction, and
• wherein the position of the stator combs has a negative offset in the z-direction in relation to the rotor combs in the fourth pair when the at least one proof mass is in the rest position, so that respective capacitances decrease in the fourth pair when the at least one proof mass moves away from the rest position in a positive z-direction, and increase or remain constant when the at least one proof mass moves away from the rest position in a negative z-direction.