Plane polishing machine
AssigneeNoritake Co., Limited
InventorMakoto Sato
Life of this patent
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Abstract
A plane polishing machine polishing one surface of a workpiece flat, the plane polishing machine comprises a stick-on disk decentering jig of a circular plate shape mounted on a rotating polishing surface plate, a jig rotation drive device having a plurality of guide rollers coming into contact with the stick-on disk decentering jig, a rotational direction restriction device permitting rotation of the stick-on disk in a direction identical to a rotational direction of the stick-on disk decentering jig and inhibiting rotation of the stick-on disk in a direction opposite to the rotational direction of the stick-on disk decentering jig, and a jig rotation suppression device periodically suppressing rotation of the stick-on disk decentering jig rotated by the drive guide roller, for a predetermined period.
Claims7
A plane polishing machine polishing one surface of a workpiece flat, the workpiece stuck on a bottom surface of a stick-on disk of a circular plate shape being held on and in sliding contact with a polishing surface of a polishing surface plate rotating in one direction, the plane polishing machine comprising:
- a stick-on disk decentering jig of a circular plate shape mounted on the polishing surface plate and having an eccentric aperture formed therethrough into which the stick-on disk is pivotably fitted;
- a jig rotation drive device having a plurality of guide rollers coming into contact with the stick-on disk decentering jig that prevents the stick-on disk decentering jig from moving in a circumferential direction together with the polishing surface plate, the jig rotation drive device rotationally driving the stick-on disk decentering jig so as to revolve, around a pivot center line of the stick-on disk, along a predetermined revolution trajectory via a drive guide roller of the plurality of guide rollers;
- a rotational direction restriction device permitting rotation of the stick-on disk in a direction identical to a rotational direction of the stick-on disk decentering jig and inhibiting rotation of the stick-on disk in a direction opposite to the rotational direction of the stick-on disk decentering jig;
- and
- a jig rotation suppression device periodically suppressing rotation of the stick-on disk decentering jig rotated by the drive guide roller, for a predetermined period.
Dependencies are inferred from the claim text.