Foreign particle removing method, formation method, article manufacturing method, foreign particle removing apparatus, and system

A foreign particle removing method of removing a foreign particle on a first member, the method comprising:

• supplying a composition to a supply region on the first member;
• setting a target region wider than the supply region on the first member, and pressing a second member against the composition supplied on the first member in the supplying, such that the composition on the first member spreads over the target region and entraps a foreign particle in the target region;
• curing the composition on the first member after the pressing, in a state in which the composition and the second member are in contact with each other;
• and
• separating the second member from the first member after the curing, in a state in which the second member and the composition adhere to each other, thereby separating the composition from the target region of the first member,
• wherein the second member includes a press surface to be pressed against the composition, and also includes, on the press surface, a plurality of first groove portions radially extending so as to guide a spread of the composition in the pressing.