CMUT transducer
AssigneeVermon
InventorsDominique Gross, Cyril Meynier, Nicolas Senegond
Life of this patent
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Abstract
The present disclosure relates to a CMUT transducer (200) comprising: a substrate (101) coated with a dielectric layer (103); a cavity (105) formed in the dielectric layer (103); a conductive or semiconductor membrane (107) suspended above the cavity (105); and a dielectric coating (104) arranged on an upper surface of the substrate (101) at the bottom of the cavity or on a lower surface of the membrane at the top of the cavity and extending, in top view, on the most part of the surface of the cavity (105), wherein the dielectric coating (104) is structured opposite the cavity (105).
Claims9
A CMUT transducer comprising:
- a substrate coated with a dielectric layer;
- a cavity formed in the dielectric layer;
- a membrane suspended above the cavity, the membrane being a conductor or a semiconductor;
- and
- a dielectric coating arranged on an upper surface of the substrate at the bottom of the cavity or on a lower surface of the membrane at the top of the cavity and extending, in top view, on a majority of the respective upper surface of the substrate or lower surface of the membrane,
- wherein the dielectric coating comprises a first portion having a first thickness opposite a peripheral portion of the cavity, a second portion having a second thickness greater than the first thickness opposite a central portion of the cavity, and, between the first and second portions, at least one third portion having an intermediate thickness between the first and second thicknesses.
A CMUT transducer comprising:
- a substrate coated with a dielectric layer;
- a cavity formed in the dielectric layer;
- a membrane suspended above the cavity, the membrane being a conductor or a semiconductor;
- and
- a dielectric coating arranged on an upper surface of the substrate at the bottom of the cavity or on a lower surface of the membrane at the top of the cavity and extending, in top view, on a majority of the respective upper surface of the substrate or lower surface of the membrane,
- wherein the dielectric coating comprises a first portion having a first thickness opposite a peripheral portion of the cavity, a second portion having a second thickness greater than the first thickness opposite a central portion of the cavity, and a third portion having a third thickness greater than the second thickness between the first and second portions.
Dependencies are inferred from the claim text.