Back to results
US 12,424,475 B2Granted
Ceramic joined body, electrostatic chuck device, and method for producing ceramic joined body
AssigneeSumitomo Osaka Cement Co., Ltd.
InventorsNobuhiro Hidaka, Yukio Miura, Jun Arikawa, Hironori Kugimoto
Life of this patent
Estimating the term…
Abstract
A ceramic joined body (1) includes: a pair of ceramic plates (2,3) that include a conductive material; a conductive layer (4) and an insulating layer (5) that are interposed between the pair of ceramic plates (2, 3); and a pair of intermediate layers (6, 7) that are interposed between the pair of ceramic plates (2, 3) and the conductive layer (4) and are in contact with the pair of ceramic plates (2, 3) and the conductive layer (4).
Claims20
A ceramic joined body comprising:
- a pair of ceramic plates that include a conductive material;
- a conductive layer and an insulating layer that are interposed between the pair of ceramic plates;
- a pair of intermediate layers that are interposed between the pair of ceramic plates and the conductive layer and are in contact with the pair of ceramic plates and the conductive layer;
- and
- wherein when a thickness of the conductive layer is represented by t1 and a total thickness of the intermediate layers is represented by t2, a thickness ratio R1 of the intermediate layers which is defined by a following formula (1) is 3% or more,
- R1=t2/t1×100(%) (1).
3 more elements
Dependencies are inferred from the claim text.