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US 12,424,464 B2Granted
Radiation shield
AssigneeASM IP Holding B.V.
InventorMelvin Verbaas
Life of this patent
Estimating the term…
Abstract
A radiation shield and an assembly and a reactor including the radiation shield are disclosed. The radiation shield can be used to control heat flux from a susceptor heater assembly and thereby enable better control of temperatures across a surface of a substrate placed on a surface of the susceptor heater assembly.
Claims17
An apparatus for supporting a substrate during a reaction process, the apparatus comprising:
- a susceptor heater assembly comprising a substrate support surface, a base, and a side surface;
- and
- a radiation shield coupled to the susceptor heater assembly, wherein the radiation shield is positioned opposite the substrate support surface proximate to a bottom surface of the base, wherein the radiation shield comprises a plate having an outer diameter and an inner diameter, and wherein the plate is coupled to the side surface of the susceptor heater assembly at the outer diameter and is spaced apart a distance at the inner diameter from a movable pedestal adapted to vertically position the susceptor heater assembly in the reaction chamber.
An apparatus for supporting a substrate during a reaction process, the apparatus comprising:
- a susceptor heater assembly comprising a substrate support surface, a base, and a side surface;
- a flow control ring coupled to the side surface and extending along a perimeter of the susceptor heater assembly;
- and
- a radiation shield coupled to the flow control ring, wherein the radiation shield is positioned opposite the substrate support surface proximate to a bottom surface of the base, and wherein the radiation shield comprises a plate, wherein the plate is supported at an outer diameter by the flow control ring, wherein a gap is provided between the plate and the bottom surface of the base of the susceptor heater assembly, and wherein the plate does not contact the heater assembly at an inner diameter.
1 more element
Dependencies are inferred from the claim text.