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US 12,424,431 B2Granted
Excimer lamp and UV irradiation unit including the same
AssigneeORC Manufacturing Co., Ltd.
InventorsGo Kobayashi, Shigeru Kitazawa, Izumi Serizawa
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Abstract
An excimer lamp includes an exterior tube, an interior tube coaxially arranged in the exterior tube, and an inner electrode embedded between the exterior tube and a cladding tube configured to cover at least part of the exterior tube. An outer electrode is provided at the side of the outer surface of the exterior tube. The inner electrode is a foil electrode and the opposite sides of the inner electrode are flattened along the width direction. Both edges of the inner electrode are pointed.
Claims9
An excimer lamp comprising:
- an exterior tube, an outer electrode being provided at the side of the outer surface of said exterior tube;
- an interior tube coaxially arranged in said exterior tube;
- and
- an inner electrode embedded between said exterior tube and a cladding tube configured to cover at least part of said exterior tube,
- wherein said inner electrode is a foil electrode, the opposite sides of said inner electrode are flattened along the width direction, and both edges of said inner electrode are pointed, and
- wherein a width of said inner electrode is smaller than an outer diameter of said interior tube in a plan view.
3 more elements
Dependencies are inferred from the claim text.