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US 12,422,726 B2Granted
Method of making thin film lithium niobate electro-optical modulators
AssigneeOptilab, LLC
InventorsHenry H. Hung, Leijun Yin, Xiaoyan Ying, Ke Huang
Life of this patent
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Abstract
A method of forming an electro-optical modulator including forming a lithium-niobate (LN) wafer including an optical waveguide situated within and proximate a first side of the LN wafer; bonding the LN wafer to a substrate such that the first side of the LN wafer faces the substrate; thinning the LN wafer; and forming coplanar transmission lines over and/or on a second side of the LN wafer, wherein the coplanar transmission lines extend parallel with and are laterally on either side of the optical waveguide.
Claims25
A method, comprising:
- forming a lithium-niobate (LN) wafer including an optical waveguide situated within and proximate a first side of the LN wafer;
- forming a bonding layer over and/or on a first side of a substrate;
- and
- thinning the bonding layer to a first thickness,
- bonding the LN wafer to the substrate such that the first side of the LN wafer faces the first side of substrate;
- thinning the LN wafer;
- and
- forming coplanar transmission lines over and/or on a second side of the LN wafer,
- wherein the coplanar transmission lines extend parallel with and are laterally on either side of the optical waveguide;
- wherein bonding the LN wafer to the substrate comprises attaching the LN wafer to the substrate via the thinned bonding layer, and
- wherein thinning the LN wafer comprises thinning the LN wafer so that a defined total thickness is achieved for the attached LN wafer and the bonding layer.
8 more elements
Dependencies are inferred from the claim text.