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US 12,422,357 B2Granted
Chamber moisture control using narrow optical filters measuring emission lines
AssigneeApplied Materials, Inc.
InventorsSven Schramm, Martin Hilkene, Elias Martinez, Amir Bayati
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Abstract
Embodiments disclosed herein include a moisture detection module. In an embodiment, the moisture detection module comprises an optical bandpass filter configured to be optically coupled to a light source, where a passband is centered at 309 nm. In an embodiment, the moisture detection module further comprises a detector optically coupled to the optical bandpass filter.
Claims10
A semiconductor processing tool, comprising:
- a chamber;
- a viewport through a wall of the chamber;
- and
- a detection module optically coupled to the viewport, wherein the detection module comprises:
- an optical bandpass filter with a passband that is up to 10 nm, the optical bandpass filter optically coupled to a light source;
- and
- a first detector optically coupled to the optical bandpass filter;
- and
- a second detector, wherein the second detector is optically coupled to the light source without an intervening optical bandpass filter.
6 more elements
A method for detecting moisture in a chamber, comprising:
- initiating a plasma in the chamber;
- passing electromagnetic radiation through a port in the chamber;
- filtering the electromagnetic radiation with a bandpass filter with a passband that is 10 nm wide or smaller;
- detecting the filtered electromagnetic radiation with a first detector;
- and
- detecting the electromagnetic radiation with a second detector without an intervening optical bandpass filter.
3 more elements
Dependencies are inferred from the claim text.