Sensor device for measuring a temperature difference in a computer chip system
AssigneeRobert Bosch GmbH
InventorsAmin Jemili, Jochen Reinmuth
Life of this patent
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Abstract
A sensor system. The sensory system includes a substrate extending in a substrate plane, a closed cavity and a movable structure in the closed cavity, at least one portion of the movable structure being situated at a distance opposite a surface of the substrate extending in parallel to the main extension plane within the cavity, the distance varying when the movable structure is deflected, a temperature difference between the surface of the substrate and the movable structure being measurable by an action of force on the movable structure.
Claims7
A sensor system, comprising:
- a substrate extending in a main extension plane;
- a closed cavity;
- and
- a movable structure in the closed cavity, at least one portion of the movable structure being situated at a distance opposite a surface of the substrate within the cavity extending in parallel to the main extension plane, the distance varying when the movable structure is deflected, wherein a temperature difference between the surface of the substrate and the movable structure is measurable by an action of force on the movable structure,
- wherein the movable structure is a two-sided rocker structure having an axis of rotation, the rocker structure including a first rocker element and a second rocker element, at least one portion of the first rocker element being situated at a distance opposite the surface of the substrate extending in parallel to the main extension plane within the cavity and at least one portion of the second rocker element being situated at a further distance opposite a further surface of the substrate extending in parallel to the main extension plane within the cavity, a distribution of mass of the rocker structure relative to the axis of rotation being balanced out with respect to accelerative forces acting perpendicularly to the main extension plane,
- wherein in a geometric asymmetry of the rocker structure about the axis of rotation, a mass of the first rocker element and a mass of the second rocker element are chosen in such a way that the rocker structure is balanced out with respect to accelerative forces acting perpendicularly to the main extension plane,
- wherein multiple rocker structures are situated in the sensor system within separate closed cavities, each cavity having a different gas pressure.
A method for measuring a temperature difference between a surface of a substrate and a movable structure using a sensor system, the sensor system including a substrate extending in a main extension plane, a closed cavity, and a movable structure in the closed cavity, at least one portion of the movable structure being situated at a distance opposite a surface of the substrate within the cavity extending in parallel to the main extension plane, the distance varying when the movable structure is deflected, the method comprising:
- measuring a temperature difference between the surface of the substrate and the movable structure by an action of force on the movable structure,
- wherein the movable structure is a two-sided rocker structure having an axis of rotation, the rocker structure including a first rocker element and a second rocker element, at least one portion of the first rocker element being situated at a distance opposite the surface of the substrate extending in parallel to the main extension plane within the cavity and at least one portion of the second rocker element being situated at a further distance opposite a further surface of the substrate extending in parallel to the main extension plane within the cavity, a distribution of mass of the rocker structure relative to the axis of rotation being balanced out with respect to accelerative forces acting perpendicularly to the main extension plane,
- wherein in a geometric asymmetry of the rocker structure about the axis of rotation, a mass of the first rocker element and a mass of the second rocker element are chosen in such a way that the rocker structure is balanced out with respect to accelerative forces acting perpendicularly to the main extension plane,
- wherein multiple rocker structures are situated in the sensor system within separate closed cavities, each cavity having a different gas pressure.
Dependencies are inferred from the claim text.