US 12,422,307 B2 · MEMS thermal sensor array

Abstract

A novel high temperature thermal sensing method and device is disclosed that can employ a dual-sensing platinum resistor encased in a mono-crystalline alpha-alumina (sapphire) substrate. The device can comprise four platinum trace elements, oriented with 90° rotational symmetry atop a 1120 oriented crystal lattice substrate. The resistance temperature detectors (RTD) temperature measurement calibration can then be monitored for drift and corrected by comparing the differential strain-derived measurement of temperature to the temperature derived from the RTD measurement. This can allow the device to self-calibrate via comparison of two functionally independent measures of electron mobility and operate in extreme environments which have previously caused RTD sensors to drift from their initial calibration and introduce an undefined measurement error.

Claims13

Dependent claims

A temperature sensor, comprising:

a nonconducting substrate having a surface aligned with a plane of the substrate and exhibiting an anisotropic coefficient of thermal expansion (CTE) in the plane;
electrical traces bonded to the surface of the nonconducting substrate, the electrical traces comprising four meander-lines forming a Wheatstone bridge circuit;
and
a graphite spherical pebble where the nonconducting substrate is disposed on a surface of the graphite spherical pebble.

1 more element

Dependencies are inferred from the claim text.

MEMS thermal sensor array

Life of this patent

MEMS thermal sensor array

Life of this patent

Abstract

Claims13