Cylindrical silicon ingot manufacturing method
AssigneeBCnC Co., Ltd.
InventorsKwang Hee Seol, Seo Hwan Lee
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AssigneeBCnC Co., Ltd.
InventorsKwang Hee Seol, Seo Hwan Lee
Estimating the term…
Provided is a cylindrical ingot manufacturing method including: an operation of supplying a silicon raw material to an inside of a crucible and heating the crucible to melt the silicon raw material; an operation of supplying a seed crystal having one end fastened to a seed shaft to the inside of the crucible; and an operation of moving the seed crystal from a lower portion of the crucible to an upper portion thereof by the crucible rotating in one direction relative to the seed shaft and the seed shaft rotating in the other direction and moving upward. According to the present disclosure, since a ring-shaped seed crystal is grown, a cylindrical silicon ingot can be manufactured, and since a cylindrical silicon ingot having an inner diameter is formed, a wafer retaining ring can be manufactured from the ingot without a coring task.
A cylindrical ingot manufacturing method comprising:
Dependencies are inferred from the claim text.