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US 12,421,122 B2Granted
Gas storage systems and method thereof
AssigneeEntegris, Inc.
InventorsOleg Byl, Diego Troya, Nathan B. Jones, John R. Morris
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Abstract
Described are gas storage medium and methods of storing source gases in the gas storage medium, particularly relating to using hydroxylated metal oxides or hydroxylated metalloid oxides as a storage medium for storing diborane.
Claims6
A composition for gas storage, comprising hydroxylated silica, wherein the hydroxylated silica includes surface silicon atoms and isolated hydroxyl groups attached to the surface silicon atoms;
- and further including diborane atoms reversibly adsorbed to the isolated hydroxyl groups, wherein the diborane atoms are bonded to the surface silicon atoms by bifurcated di-hydrogen bond.
Dependencies are inferred from the claim text.