Manufacturing method for graphite slider arrays
AssigneesResearch Institute of Tsinghua University in Shenzhen, Tsinghua University
InventorsQuanshui Zheng, Haiyang Jiang, Kaiwen Tian
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Abstract
Provided is a manufacturing method for graphite slider arrays in batches. In this method, a grain structures examination step is added to a process of manufacturing graphite slider arrays, and a subsequent etching step is controlled so that only one horizontal grain boundary exists inside the graphite mesas, and when cleaved, the sliders slide away on the only grain boundary. The slider arrays prepared by this method have uniform easy-slip surfaces and thickness with good consistency.
Claims10
A manufacturing method for graphite slider array, comprising:
- in step 1:
- covering at least photoresist on highly oriented pyrolytic graphite (HOPG);
- in step 2:
- patterning the photoresist and retaining a plurality of photoresist mesas;
- in step 3:
- etching the HOPG and removing part of the HOPG that is not protected by the photoresist, so as to form a plurality of graphite mesas;
- and
- in step 4:
- removing residual photoresist to obtain the graphite slider array;
- before the step 1, performing an examination on three-dimensional grain structures near surfaces of the HOPG to obtain grain information of polycrystalline structures near the surfaces of the HOPG;
- and
- in the step 3, based on the grain information of the polycrystalline structures, controlling the etching process so that each of the plurality of graphite mesas made through the etching process comprises only one horizontal grain boundary layer.
Dependencies are inferred from the claim text.