Overhead hoist transport device

An overhead hoist transport device comprising:

• transport vehicles having a space in which articles are loaded and unloaded, and including traveling wheels, guide wheels, and steering wheels;
• a traveling rail positioned along the ceiling of a semiconductor manufacturing line and providing a moving path for the article transport vehicles;
• measuring sensors attached to the article transport vehicles and configured to measure a traveling state of different article transport vehicles in real time;
• a server for transmitting and receiving measured values of the measuring sensors;
• and
• a system configured to receive the measured values from the server;
• wherein
• the traveling rail includes at least one traveling section among a straight section, a curved section, and a branching section, and wherein
• the system is further configured to determine whether specific wheels of the article transport vehicles are detached in the traveling section.

An overhead hoist transport device comprising:

• article transport vehicles having a space in which articles are loaded and unloaded and including traveling wheels, guide wheels, and steering wheels;
• a traveling rail positioned along a ceiling of a semiconductor manufacturing line, providing a moving path for the article transport vehicles, and including a straight section, a curved section, and a branching section;
• measuring sensors attached to the different article transport vehicles and configured to measure a speed, vibration, and a torque of the article transport vehicles in real time;
• a server for transmitting and receiving measured values of the measuring sensors;
• and
• a system configured to receive the measured values from the server and monitor the traveling state of the article transport vehicles;
• wherein
• the server and the system are located apart from the article transport vehicles,
• and the system is further configured to determine whether specific wheels of the article transport vehicles are detached for each section of the traveling rail.