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US 12,420,304 B2Granted
Coating apparatus and coating method
AssigneesKabushiki Kaisha Toshiba, Toshiba Energy Systems & Solutions Corporation
InventorsNaomi Shida, Katsuyuki Naito, Yutaka Saita
Life of this patent
Estimating the term…
Abstract
According to one embodiment, a coating apparatus includes a coating bar configured to face a member to be coated, and a plurality of nozzles configured to supply a liquid toward the coating bar. A number of the nozzles is 3 or more. An arithmetic mean roughness Ra of at least a part of a surface of the coating bar is not less than 0.5 μm and not more than 10 μm.
Claims17
A coating apparatus, comprising:
- a coating bar configured to face a member to be coated;
- and
- a plurality of nozzles configured to supply a liquid toward the coating bar, wherein
- a number of the nozzles is 3 or more,
- an arithmetic mean roughness Ra of at least a part of a surface of the coating bar is not less than 0.5 μm and not more than 10 μm,
- the coating bar includes at least one selected from the group consisting of stainless steel, titanium, and aluminum,
- the surface includes an oxide of the at least one selected from the group consisting of stainless steel, titanium, and aluminum, and
- a contact angle of the surface with respect to water is 50 degrees or less.
5 more elements
Dependencies are inferred from the claim text.