Source electrode and drain electrode protection for nanowire transistors
AssigneeIntel Corporation
InventorsKarthik Jambunathan, Biswajeet Guha, Anand S. Murthy, Tahir Ghani
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AssigneeIntel Corporation
InventorsKarthik Jambunathan, Biswajeet Guha, Anand S. Murthy, Tahir Ghani
Estimating the term…
Embodiments herein describe techniques, systems, and method for a semiconductor device. A nanowire transistor may include a channel region including a nanowire above a substrate, a source electrode coupled to a first end of the nanowire through a first etch stop layer, and a drain electrode coupled to a second end of the nanowire through a second etch stop layer. A gate electrode may be above the substrate to control conductivity in at least a portion of the channel region. A first spacer may be above the substrate between the gate electrode and the source electrode, and a second spacer may be above the substrate between the gate electrode and the drain electrode. A gate dielectric layer may be between the channel region and the gate electrode. Other embodiments may be described and/or claimed.
A semiconductor device, comprising:
A computing device, comprising:
Dependencies are inferred from the claim text.