Vented susceptor
AssigneeASM IP Holding B.V.
InventorThomas Fitzgerald
Life of this patent
Estimating the term…
Abstract
A susceptor can include a face that is configured to support a substrate thereon and a plurality of channels extending into the face and radially outwardly relative to a center of the face. One or more of the plurality of channels may include an elongate portion and a flash-out portion. The elongate portion may have a width less than a threshold width along the entirety of the elongate portion. The flash-out portion may be in fluid communication with the elongate portion and may include a first section having a first width and a second section having a second width greater than the first width. The first section may be disposed radially inward of the second section.
Claims20
A susceptor comprising:
- a face configured to support a substrate thereon;
- an inner region, wherein the inner region centered on a center of the face;
- and
- a channel region, wherein the channel region is disposed radially outward from the inner region, wherein the channel region comprises a plurality of channels, a plurality of elevated regions, and an outer rim disposed radially outward from the plurality of channels,
- wherein the plurality of channels extends into the face and radially outwardly from the inner region to the outer rim, wherein each of the plurality of channels spans between two elevated regions, each of the plurality of channels comprising:
- an elongate portion having an elongate portion width;
- and
- a flash-out portion in fluid communication with the elongate portion, the flash-out portion comprising a distal end at the outer rim, a first section having a first width and a second section having a second width greater than the first width, wherein the first section is disposed radially inward of the second section, and wherein each of the plurality of channels spans the second width, and
- wherein the plurality of elevated regions extend radially outwardly from the inner region to the outer rim, wherein each of the plurality of elevated regions spans between two adjacent channels, wherein each of the plurality of channels spans between two adjacent elevated regions.
A susceptor comprising:
- a face configured to support a substrate thereon;
- a plurality of channels extending into the face and radially outwardly relative to a center of the face, each of the plurality of channels comprising a distal end, the distal ends of the plurality of channels forming an annular purge perimeter, the plurality of channels configured to produce at least one of a substantially uniform velocity and pressure of gas around the purge perimeter, during a radial flow of gas through the channels;
- and
- a plurality of elevated regions extending radially outwardly to the purge perimeter, wherein each of the plurality of elevated regions spans between two channels,
- wherein a width of each of the plurality of channels is greatest at the distal end, and wherein each of the plurality of channels spans a width of the distal end.
Dependencies are inferred from the claim text.