Physical vapor deposition source and chamber assembly

A physical vapor deposition (PVD) chamber, comprising:

• a magnetron translation assembly, comprising:
• a first linear actuator assembly comprising:
• a first mount that is configured to be positioned along a first rail aligned in a first direction;
• and
• a first actuator that is configured to position the first mount along the first rail;
• a second linear actuator assembly comprising:
• a second mount that is configured to be positioned along a second rail aligned in a second direction that is perpendicular to the first direction, and the first linear actuator assembly is coupled to a mounting surface of the second mount;
• and
• a second actuator that is configured to position the second mount and the first linear actuator assembly along the second rail;
• a magnet assembly comprising an inner pole having an inner pole piece and an outer pole having an outer pole piece, wherein the inner pole piece and the outer pole piece are oriented parallel to a plane and have opposing magnetic polarities;
• and
• a rotation actuator coupled between a mounting surface of the first mount of the first linear actuator assembly and the magnet assembly, wherein the rotation actuator is configured to rotate the magnet assembly about a first axis, wherein the first and second actuators simultaneously translate the magnet assembly along the first and second directions, and wherein the first and second actuators are separately controlled from the rotation actuator;
• a pedestal disposed within a processing region of the PVD chamber, the pedestal having an upper surface that is configured to support a substrate thereon;
• a first motor coupled to the pedestal, the first motor configured to rotate the pedestal about a second axis that is perpendicular to at least a portion of the upper surface of the pedestal;
• and
• a controller comprising memory for storing a program, the program comprising instructions when executed by a processor of the controller synchronize:
• a movement of the first mount and rotation actuator along the first rail, by use of the first actuator,
• a movement of the second mount, the first linear actuator assembly, and rotation actuator along the second rail, by use of the second actuator, and
• a rotation of the magnet assembly about the first axis, wherein the first axis and second axis are non-parallel.

A magnetron translation assembly, comprising:

• a first linear actuator assembly comprising:
• a first rail aligned in a first direction;
• and
• a first actuator that is configured to position a first mount along the first rail;
• a magnet assembly mounted on the first mount, the magnet assembly constructed and arranged to be rotated about an axis;
• and
• a second linear actuator assembly comprising:
• a second mount that is configured to be positioned along a second rail aligned in a second direction, wherein the first linear actuator assembly is coupled to a mounting surface of the second mount, wherein the first and second actuators simultaneously translate the magnet assembly along the first and second directions, and wherein the first and second actuators are separately controlled from the rotation actuator.