Methods, systems, and apparatus for monitoring radiation output of lamps

A method of monitoring a plurality of lamps of a processing chamber, comprising:

• identifying each of the lamps with one or more zones;
• collecting radiation emitted by the plurality of lamps;
• generating information about the collected radiation for each zone;
• analyzing the information, the analyzing comprising:
• for each zone:
• determining a function of radiation over time;
• and
• monitoring the function for a first condition associated with lamp aging;
• and
• based on the analyzing the information, performing at least one of the following actions:
• varying input power delivered to at least one of the lamps;
• and
• generating an alert;
• wherein the processing chamber further comprises:
• a substrate support within a processing volume;
• an upper plurality of lamps, the upper plurality of lamps comprising two or more upper outer zone lamps in an upper outer zone and two or more upper inner zone lamps in an upper inner zone, and the upper plurality of lamps is disposed above the processing volume between an upper window and a lid;
• and
• a lower plurality of lamps, the lower plurality of lamps comprising two or more lower outer zone lamps in a lower outer zone and two or more lower inner zone lamps in a lower inner zone, and the lower plurality of lamps is disposed below the processing volume between a lower window and a floor.

A system for processing substrates, comprising:

• a processing chamber comprising a substrate support within a processing volume;
• a plurality of lamps coupled to the processing chamber, the plurality of lamps comprising:
• each of the plurality of lamps is identified with one or more zones;
• an upper plurality of lamps, the upper plurality of lamps comprising two or more upper outer zone lamps in an upper outer zone and two or more upper inner zone lamps in an upper inner zone, and the upper plurality of lamps is disposed above the processing volume between an upper window and a lid;
• and
• a lower plurality of lamps, the lower plurality of lamps comprising two or more lower outer zone lamps in a lower outer zone and two or more lower inner zone lamps in a lower inner zone, and the lower plurality of lamps is disposed below the processing volume between a lower window and a floor;
• one or more radiation sensors coupled to the processing chamber, wherein each radiation sensor is proximal at least one lamp, and wherein each the radiation sensor comprises:
• a sensor unit capable of detecting radiation in a wavelength range of about 300 nm to about 5,000 nm;
• a sensor cap that caps the sensor unit and comprises silicon carbide coated graphite;
• and
• a shielding base capable of thermally isolating the sensor unit from its support structure;
• and
• a controller comprising instructions that, when executed by a processor, cause:
• the one or more radiation sensors to convey, to the controller, information associated with radiation emitted by the plurality of lamps;
• the controller to analyze the information, the analyzing comprising:
• for each zone:
• determining a function of radiation over time;
• and
• monitoring the function for a first condition associated with lamp aging;
• and
• the controller to, based on the analyzing the information, perform at least one of the following actions:
• vary input power delivered to at least one of the lamps;
• and
• generate an alert.