Multiple image segmentation and/or multiple dynamic spectral acquisition for material and mineral classification
AssigneeFEI Company
InventorsDarius Kocár, Michael James Owen
Life of this patent
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Abstract
The invention relates to method and system configured for material analysis and mineralogy. At least one image based on first emission from a sample is provided. First spectra of the sample based on second emissions from the second scan locations of the image are provided. A confidence score is calculated for every first spectrum, and second scan location(s) with confidence score(s) below a threshold value are selected. Second emissions from the selected second scan location(s) are acquired to provide new image and determine new second scan locations within the respective new image.
Claims20
A system configured for material analysis and mineralogy, comprising a scanning microscope system, the scanning microscope system comprising a first detector and a second detector, and further comprising a data-processing system, the data-processing system comprising a data-storage component, and a first spectral analysis component;
- wherein the data-storage component is configured for providing at least one or a plurality of images of a sample or sections thereof based on first emissions detected by the first detector within a first dwell period from a plurality of first scan locations;
- wherein the second detector is configured for detecting second emissions for a second dwell period from at least one or a plurality of second scan locations of at least one region of the at least one image, each second scan location relating to a part of the corresponding region;
- wherein the data-storage component is configured for providing at least one or a plurality of first spectra, wherein each first spectrum is based on the second emissions detected at each of the second scan location(s) of the at least one region;
- wherein the first spectral analysis component is configured for calculating a confidence score for every first spectrum and selecting the second scan location(s) relating to the first spectrum (-a) with confidence score(s) below a threshold value;
- wherein the second detector is configured for detecting second emissions for a third dwell period from at least one of the selected second scan location(s);
- and
- wherein the data-processing system is configured for determining the third dwell period for the at least one of the selected second scan location(s) based on the calculated confidence score of the respective first spectrum.
A method for determining the properties of a sample or sections thereof, comprising:
- providing at least one or a plurality of images of the sample or sections thereof based on first emissions detected within a first dwell period from a plurality of first scan locations;
- performing a first detection step, comprising detecting second emissions for a second dwell period from at least one or a plurality of second scan locations of at least one region of the at least one image, each second scan location relating to a part of the corresponding region;
- performing a first spectrum providing step, comprising providing at least one or a plurality of first spectra, wherein each first spectrum is based on the second emissions detected at each of the second scan location(s) of the at least one region;
- performing a first spectral analysis step, comprising calculating a confidence score for every first spectrum and selecting the second scan location(s) relating to the first spectrum (-a) with confidence score(s) below a threshold value;
- determining a third dwell period for at least one of the selected second scan location(s) based on the calculated confidence score of the respective first spectrum,
- performing a classification step, comprising detecting the second emissions for the third dwell period from the at least one of the selected second scan location(s).
Dependencies are inferred from the claim text.