Image device and motherboard for image device
AssigneeSeiko Epson Corporation
InventorsTomoki Yokota, Kikuya Morita
Life of this patent
Estimating the term…
Abstract
At a motherboard for an image device, which is used for manufacturing an image device such as a liquid crystal device, an organic electroluminescence device, a mirror device, and an image-capturing device, a mark for alignment is provided on an outer side of a pixel area in which a plurality of pixels are arranged. In the photo-lithography process, a light exposure mask is arranged by using the mark as a reference position. For the mark, a recessed portion provided in a motherboard main body is filled with a filling film. The recessed portion includes a first groove extending along a first direction and a second groove extending along a second direction intersecting with the first direction, the second groove not intersecting with the first groove in plan view.
Claims12
An image device comprising:
- a substrate body;
- and
- a mark including:
- a recessed portion provided in the substrate body and
- a filling film filled in the recessed portion, wherein
- the recessed portion includes:
- a first groove extending along a first direction and
- a second groove extending along a second direction intersecting with the first direction, the second groove disconnected from the first groove in a plan view,
- wherein
- a pixel electrode for applying a voltage to an electro-optical layer, a light-emitting element, a mirror, or a photoreceptor element is provided in a pixel.
A motherboard for an image device, the motherboard comprising:
- a motherboard main body;
- and
- a mark including:
- a recessed portion provided in the motherboard main body and
- a filling film filled in the recessed portion, wherein
- the recessed portion includes:
- a first groove extending along a first direction and
- a second groove extending along a second direction intersecting with the first direction, the second groove disconnected from the first groove in a plan view,
- wherein
- a pixel electrode for applying a voltage to an electro-optical layer, a light-emitting element, a mirror, or a photoreceptor element is provided in a pixel.
An image device comprising:
- a substrate body including:
- a first recess provided in a pixel region, and
- a second recess provided outside the pixel region;
- a capacitance element including a multi-layered film provided in the first recess;
- and
- a mark including a filling film in the second recess including a multi-layered film identical to the multi-layered film constituting the capacitance element, wherein
- the first recess includes:
- a first groove extends along a first direction, and
- a second groove extends along a second direction that intersects the first direction and disconnects from the first groove in a planar view, and
- the second recess includes:
- a third groove extends along the first direction, and
- a fourth groove extends along the second direction and connects to the third groove in the planar view.
Dependencies are inferred from the claim text.