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US 12,416,762 B2Granted
Tunable optical filter device
AssigneeShenzhen Hypernano Optics Technology Co., Ltd.
InventorBin Guo
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AssigneeShenzhen Hypernano Optics Technology Co., Ltd.
InventorBin Guo
Estimating the term…
Disclosed is an adjustable optical filter device. The device comprises a first glass thin film provided with a first mirror and a second glass thin film provided with a second mirror. The peripheries of the surfaces of the first glass thin film and the second glass thin film that have a mirror are bonded to each other by means of a bond to form a cavity between the mirrors. The first glass thin film or the second glass thin film is provided with a driving unit for controlling the relative displacement of the first glass thin film and/or the second glass thin film. The tunable optical filter device has better optical filtering performance than existing filter devices, has the performance of small size and lower driving voltage, and can be applied to devices having a limited size, such as miniature spectrometers, small or even mini hyperspectral cameras or mobile phones.
A tunable optical filter device, wherein the device comprises a first glass film having a first mirror and a second glass film having a second mirror, and the surfaces of the first glass film and the second glass film on which the first mirror and the second mirror are located are bonded to each other at the periphery through a bonding compound to form a cavity between the first mirror and the second mirror, and the first glass film or the second glass film are provided with a driving unit for directly driving deformation of the first glass film and/or the second glass film and thereby creating a movement thereof, at least a part of the driving unit used to drive the deformation is arranged outside the cavity between the first mirror and the second mirror, and wherein a surface of the second glass film opposite to the second mirror is provided at the periphery with a support member formed by silicon.
Dependencies are inferred from the claim text.