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US 12,416,692 B2Granted
Stray field immune angle sensor
AssigneeAllegro MicroSystems, LLC
InventorHernán D. Romero
Life of this patent
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Abstract
A sensor, comprising: a substrate having a reference crystal orientation and a plurality of vertical Hall element pairs that are formed on the substrate. Each vertical Hall element pair includes: (i) a respective first vertical Hall element that is oriented at a respective first angle relative to the reference crystal orientation of the substrate and (ii) a respective second vertical Hall element that is oriented at a respective second angle relative to the reference crystal orientation of the substrate. The substrate has a rectangular shape, and each of the vertical Hall element pairs is disposed in a different respective corner of the substrate.
Claims24
A sensor, comprising:
- a substrate having a reference crystal orientation;
- and
- a plurality of vertical Hall element pairs that are formed on the substrate, each vertical Hall element pair including:
- (i) a respective first vertical Hall element that is oriented at a respective first angle relative to the reference crystal orientation of the substrate and (ii) a respective second vertical Hall element that is oriented at a respective second angle relative to the reference crystal orientation of the substrate,
- wherein the substrate has a rectangular shape, and each of the vertical Hall element pairs is disposed in a different respective corner of the substrate,
- wherein the respective first vertical Hall element in at least two of the vertical Hall element pairs is oriented at substantially +45 degrees relative to the reference crystal orientation of the substrate, and the respective second vertical Hall element in at least two of the vertical Hall element pairs is oriented at substantially −45 degrees relative to the reference crystal orientation of the substrate.
3 more elements
A sensor, comprising:
- a substrate having a reference crystal orientation;
- and
- a plurality of vertical Hall element pairs that are formed on the substrate, each vertical Hall element pair including:
- (i) a respective first vertical Hall element that is oriented at a respective first angle relative to the reference crystal orientation of substrate and (ii) a respective second vertical Hall element that is oriented at a respective second angle relative to the reference crystal orientation of the substrate,
- wherein the substrate has a rectangular shape, and each of the vertical Hall element pairs is disposed in a different respective corner of the substrate,
- wherein the plurality of vertical Hall elements includes a first vertical Hall element pair, a second vertical Hall element pair, a third vertical Hall element pair, and a fourth vertical Hall element pair, the sensor further comprising processing circuitry configured to generate a differential signal having a first component and a second component, the first component and the second component being defined as follows:
- firstComponent=S1,1−S4,1+S2,1−S3,1
- secondComponent=S1,2−S4,2+S2,2−S3,2
- where S1,1 is a signal that is output by the respective first vertical Hall element of the first vertical Hall element pair, S4,1 is a signal that is output by the respective first vertical Hall element of the fourth vertical Hall element pair, S2,1 is a signal that is output by the respective first vertical Hall element of the second vertical Hall element pair, S3,1 is a signal that is output by the respective first vertical Hall element of the third vertical Hall element pair, S1,2 is a signal that is output by the respective second vertical Hall element of the first vertical Hall element pair, S4,2 is a signal that is output by the respective second vertical Hall element of the fourth vertical Hall element pair, S2,2 is a signal that is output by the respective second vertical Hall element of the second vertical Hall element pair, and S3,2 is a signal that is output by the respective second vertical Hall element of the third vertical Hall element pair.
6 more elements
A sensor, comprising:
- a substrate having a rectangular shape;
- a plurality of vertical Hall element pairs that are formed on the substrate, each of the vertical Hall element pairs being formed in a different corner of the substrate, each of the vertical Hall element pairs including:
- (i) a respective first vertical Hall element that is configured to face the vertical Hall element pair's respective corner, and (ii) a respective second vertical Hall element that is configured to face away from the vertical Hall element pair's respective corner,
- wherein the substrate has a reference crystal orientation, the respective first vertical Hall element in at least two of the vertical Hall element pairs is oriented at substantially +45 degrees relative to the reference crystal orientation of the substrate, and the respective second vertical Hall element in at least two of the vertical Hall element pairs is oriented at substantially −45 degrees relative to the reference crystal orientation of the substrate.
1 more element
A sensor, comprising:
- a substrate having a rectangular shape:
- a plurality of vertical Hall element pairs that are formed on the substrate, each of the vertical Hall element pairs being formed in a different corner of the substrate, each of the vertical Hall element pairs including:
- (i) a respective first vertical Hall element that is configured to face the vertical Hall element pair's respective corner, and (ii) a respective second vertical Hall element that is configured to face away from the vertical Hall element pair's respective corner,
- wherein the plurality of vertical Hall elements includes a first vertical Hall element pair, a second vertical Hall element pair, a third vertical Hall element pair, and a fourth vertical Hall element pair, the sensor further comprising processing circuitry configured to generate a differential signal having a first component and a second component, the first component and the second component being defined as follows:
- firstComponent=S1,1−S4,1+S2,1−S3,1
- secondComponent=S1,2−S4,2+S2,2−S3,2
- where S1,1 is a signal that is output by the respective first vertical Hall element of the first vertical Hall element pair, S4,1 is a signal that is output by the respective first vertical Hall element of the fourth vertical Hall element pair, S2,1 is a signal that is output by the respective first vertical Hall element of the second vertical Hall element pair, S3,1 is a signal that is output by the respective first vertical Hall element of the third vertical Hall element pair, S1,2 is a signal that is output by the respective second vertical Hall element of the first vertical Hall element pair, S4,2 is a signal that is output by the respective second vertical Hall element of the fourth vertical Hall element pair, S2,2 is a signal that is output by the respective second vertical Hall element of the second vertical Hall element pair, and S3,2 is a signal that is output by the respective second vertical Hall element of the third vertical Hall element pair.
4 more elements
A system, comprising:
- a ring magnet having first surface, a second surface, and a bore extending from the first surface to the second surface, the bore having a central longitudinal axis;
- a substrate having a reference crystal orientation;
- a plurality of vertical Hall element pairs that are formed on the substrate, each vertical Hall element pair including:
- (i) a respective first vertical Hall element that is oriented at a respective first angle relative to the reference crystal orientation of the substrate and (ii) a respective second vertical Hall element that is oriented at a respective second angle relative to the reference crystal orientation of the substrate,
- wherein the respective first vertical Hall element in at least two of the vertical Hall element pairs is often at substantially +45 degrees relative to the reference crystal orientation of the substrate, and the respective second vertical Hall element in at least two of the vertical Hall element pairs is oriented at substantially −45 degrees relative to the reference crystal orientation of the substrate.
2 more elements
A system, comprising:
- a ring magnet having first surface, a second surface, and a bore extending from the first surface to the second surface, the bore having a central longitudinal axis,
- a substrate having a reference crystal orientation;
- a plurality of vertical Hall element pairs that are formed on the substrate, each vertical Hall element pair including:
- (i) a respective first vertical Hall element that is oriented at a respective first angle relative to the reference crystal orientation of the substrate and (ii) a respective second vertical Hall element that is oriented at a respective second angle relative to the reference crystal orientation of the substrate,
- wherein the plurality of vertical Hall elements includes a first vertical Hall element pair, a second vertical Hall element pair, a third vertical Hall element pair, and a fourth vertical Hall element pair, the system further comprising processing circuitry configured to generate a differential signal having a first component and a second component, the first component and the second component being defined as follows:
- firstComponent=S1,1−S4,1+S2,1−S3,1
- secondComponent=S1,2−S4,2+S2,2−S3,2
- where S1,1 is a signal that is output by the respective first vertical Hall element of the first vertical Hall element pair, S4,1 is a signal that is output by the respective first vertical Hall element of the fourth vertical Hall element pair, S2,1 is a signal that is output by the respective first vertical Hall element of the second vertical Hall element pair, S3,1 is a signal that is output by the respective first vertical Hall element of the third vertical Hall element pair, S1,2 is a signal that is output by the respective second vertical Hall element of the first vertical Hall element pair, S4,2 is a signal that is output by the respective second vertical Hall element of the fourth vertical Hall element pair, S2,2 is a signal that is output by the respective second vertical Hall element of the second vertical Hall element pair, and S3,2 is a signal that is output by the respective second vertical Hall element of the third vertical Hall element pair.
5 more elements
Dependencies are inferred from the claim text.