Ingot growth apparatus
AssigneesHanwha Solutions Corporation, Hanwha Corporation
InventorsYoung Min Lee, Kyung Seok Lee, Jin Sung Park, Dong Woo Bae
Life of this patent
Estimating the term…
Abstract
An ingot growth apparatus is disclosed. The ingot growth apparatus according to an embodiment of the present invention may comprise: a growth furnace having a main crucible which is disposed inside the growth furnace and in which molten silicon is held in order to grow an ingot; a susceptor formed to surround the outer surface of the main crucible and heating the main crucible; a heater formed to surround the outer surface of the susceptor and including a coil which is supplied with power to generate a magnetic field and heats the susceptor by electromagnetic induction from the magnetic field; and a heat insulation member disposed between the coil and the susceptor.
Claims11
An apparatus for growing an ingot, comprising:
- a growth furnace having a main crucible which is disposed inside the growth furnace and in which molten silicon is held in order to grow the ingot;
- a susceptor which is formed to surround an outer surface of the main crucible and heats the main crucible;
- a heater which is formed to surround the outer surface of the susceptor and includes a coil which is supplied with power to generate a magnetic field and heats the susceptor by electromagnetic induction from the magnetic field;
- and
- a heat insulation member which is disposed between the coil and the susceptor;
- wherein the heat insulation member includes at least one cut-out area formed such that one side surface of the heat insulating member in a transverse direction, which is a circumferential direction of the heat insulation member when viewed from above, and the other side surface of the heat insulating member in the transverse direction of the heat insulation member are spaced apart from each other in the transverse direction;
- and
- wherein a non-magnetic material is positioned between the one side surface of the heat insulating member and the other side surface of the heat insulation member to electrically insulate the two side surfaces from each other.
Dependencies are inferred from the claim text.