Cycloheptatriene molybdenum (0) precursors for deposition of molybdenum films
AssigneesApplied Materials, Inc., National University of Singapore
InventorsAndrea Leoncini, Paul Mehlmann, Nemanja Dordevic, Han Vinh Huynh, Doreen Wei Ying Yong
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Abstract
Molybdenum(0) coordination complexes comprising at least one cycloheptatriene ligand and optionally one or more neutral ligands which coordinate to the metal center by carbon, nitrogen or phosphorous are described. Methods for depositing molybdenum-containing films on a substrate are described. The substrate is exposed to a molybdenum precursor and a reactant to form the molybdenum-containing film (e.g., elemental molybdenum, molybdenum oxide, molybdenum carbide, molybdenum silicide, molybdenum nitride). The exposures can be sequential or simultaneous.
Claims19
A method of depositing a film, the method comprising:
- exposing a substrate to a molybdenum(0) precursor comprising at least one cycloheptatriene ligand and one or more neutral ligands coordinated by carbon, nitrogen, or phosphorous, the one or more neutral ligands comprising a monodentate ligand selected from one or more of:
- wherein each R may be independently selected from Me-, Et-, iPr-, and tBu-;
- and
- exposing the substrate to a reactant to react with the molybdenum(0) precursor to form a molybdenum film on the substrate.
A method of depositing a film, the method comprising:
- forming a molybdenum-containing film in a process cycle comprising sequential exposure of a substrate to a molybdenum(0) precursor, purge gas, reactant, and purge gas, the molybdenum(0) precursor comprising at least one cycloheptatriene ligand and one or more neutral ligands coordinated by carbon, nitrogen or phosphorous, the one or more neutral ligands comprising a monodentate ligand selected from one or more of:
- wherein each R may be independently selected from Me-, Et-, iPr-, and tBu-.
A method of depositing a film, the method comprising:
- exposing a substrate to a molybdenum(0) precursor comprising at least one cycloheptatriene ligand and one or more neutral ligands coordinated by carbon, nitrogen, or phosphorous, the one or more neutral ligands comprising a monodentate ligand selected from one or more of:
- wherein each R may be independently selected from Me-, Et-, iPr-, and tBu-, and the one or more neutral ligands optionally further comprising one or more of a bidentate ligand and a tridentate ligand;
- and
- exposing the substrate to a reactant to react with the molybdenum(0) precursor to form a molybdenum film on the substrate.
Dependencies are inferred from the claim text.