Synthetic quartz glass manufacturing method through OVD process with improved deposition efficiency
AssigneeBCnC Co., Ltd.
InventorChangwook Seol
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AssigneeBCnC Co., Ltd.
InventorChangwook Seol
Estimating the term…
A method of manufacturing synthetic quartz glass through an outside vapor deposition (OVD) process with improved deposition efficiency. When a hollow cylindrical synthetic quartz glass product is manufactured through an OVD method or the like, it is environmentally friendly in view of using a smaller amount of chlorine and is economical in view of requiring no separate treatment equipment, as compared to a conventional technique using silicon chloride (SiCl4). Also, the method, in which octamethylcyclotetrasiloxane is supplied to a deposition burner while being sprayed in the form of a droplet along with a high-pressure carrier gas and vaporized by the deposition burner, can effectively address the high-temperature heating and slow decomposition involved when octamethylcyclotetrasiloxane ([(CH3)2SiO]4) is used as a source for depositing silicon dioxide particles.
An apparatus for manufacturing synthetic quartz glass, the apparatus comprising:
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