Chemical supply system

A chemical supply system, comprising:

• a chemical supply device having a chemical container accommodating space in which a chemical container is accommodated, and configured to supply a chemical in the chemical container to a place of use of the chemical;
• and
• a mobile robot configured to fasten and separate a coupling interface to an outlet of the chemical container carried into the chemical accommodating space, the mobile robot being configured to autonomously and freely move about a floor of a facility,
• wherein:
• the mobile robot has a robot arm configured to grip the coupling interface, and
• the coupling interface comprises a coupling terminal connected to a chemical supply pipe, and a driving force transmission unit configured to transmit driving force provided from the robot arm to the coupling terminal.

A chemical supply system, comprising:

• a chemical container receiving station configured to inspect chemical information of a chemical container and confirm the chemical information;
• a temporary storage configured to store the chemical container;
• a chemical supply device configured to supply a chemical in the chemical container to a place of use of the chemical;
• first and second mobile robots configured to transfer the chemical container for which the chemical information is confirmed to the temporary storage or the chemical supply device,
• wherein the first mobile robot is configured to transfer the chemical container from the chemical container receiving station to the temporary storage and to transfer the chemical container to the second mobile robot, and
• wherein the second mobile robot is configured to receive the chemical container from the first mobile robot and transfer the chemical container received from the first mobile robot to the chemical supply device.