Acoustic wave device
AssigneeMurata Manufactuing Co. Ltd
InventorTetsuya Kimura
Life of this patent
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Abstract
An acoustic wave device includes a support, a piezoelectric layer on the support, and an IDT electrode including first and second electrode fingers. When a thickness of the piezoelectric layer is d and a center-to-center distance of the first and second electrode fingers adjacent to each other is p, d/p is less than or equal to about 0.5. When an imaginary line connecting tips of the first electrode fingers is an envelope, a direction in which the envelope extends and the direction of the Y-axis intersect each other, and about 9°≤|α|≤about 14° is satisfied, where |α| is an absolute value of a slant angle α. The slant angle α is an angle of a corner defined by the direction in which the envelope extends and the direction of the Y-axis and is an angle other than 0°.
Claims19
An acoustic wave device to be connected between a first signal end and a second signal end of a filter device, the acoustic wave device comprising:
- a support;
- a piezoelectric layer on the support, the piezoelectric layer including an X-axis, a Y-axis, and a Z-axis that are crystal axes and being made of Z-cut lithium niobate;
- and
- an IDT electrode on the piezoelectric layer;
- wherein
- the IDT electrode includes a first busbar and a second busbar that face each other, a plurality of first electrode fingers each including one end connected to the first busbar, and a plurality of second electrode fingers each including one end connected to the second busbar and being interdigitated with the plurality of first electrode fingers;
- d/p is less than or equal to about 0.5, where d is a thickness of the piezoelectric layer and p is a center-to-center distance of the first electrode fingers and the second electrode fingers adjacent to each other;
- a direction in which an envelope extends and a direction of the Y-axis intersect each other, the envelope being an imaginary line connecting tips of the plurality of first electrode fingers;
- and
- about 9°≤|α|≤about 14° is satisfied, where |α| is an absolute value of a slant angle α, the slant angle α being an angle of a corner that is defined by the direction in which the envelope extends and the direction of the Y-axis and being an angle other than 0°.
An acoustic wave device to be connected between a ground potential and a connection point between a first signal end and a second signal end of a filter device, the acoustic wave device comprising:
- a support;
- a piezoelectric layer on the support, the piezoelectric layer including an X-axis, a Y-axis, and a Z-axis that are crystal axes and being made of Z-cut lithium niobate;
- and
- an IDT electrode on the piezoelectric layer;
- wherein
- the IDT electrode includes a first busbar and a second busbar that face each other, a plurality of first electrode fingers each including one end connected to the first busbar, and a plurality of second electrode fingers each including one end connected to the second busbar and being interdigitated with the plurality of first electrode fingers;
- d/p is less than or equal to about 0.5, where d is a thickness of the piezoelectric layer and p is a center-to-center distance of the first electrode fingers and the second electrode fingers adjacent to each other;
- the plurality of first electrode fingers and the plurality of second electrode fingers extend in a direction perpendicular or substantially perpendicular to a direction of the Y-axis of the piezoelectric layer, and a direction in which an envelope extends and the direction of the Y-axis intersect each other, the envelope being an imaginary line connecting tips of the plurality of first electrode fingers;
- and
- |α|<about 9° or about 14°<|α| is satisfied, where |α| is an absolute value of a slant angle α, the slant angle α being an angle of a corner that is defined by the direction in which the envelope extends and the direction of the Y-axis and being an angle other than 0°.
Dependencies are inferred from the claim text.