Multi-color visible light source including integrated VCSELs and integrated photonic cavities

A visible light source array comprising:

• a substrate including drive circuits formed thereon;
• and
• a die or a wafer bonded to the drive circuits directly or indirectly, the die or wafer including an array of visible light sources formed thereon, wherein each visible light source in the array of visible light sources is individually addressable by the drive circuits and comprises:
• a vertical cavity formed by a first reflector and a second reflector, the first reflector and the second reflector configured to reflect infrared light;
• an active region in the vertical cavity and configured to emit infrared light;
• one or more micro-resonators within the vertical cavity, each of the one or more micro-resonators on a respective layer different from the active region and configured to resonate within the respective layer, the one or more micro-resonators configured to receive the infrared light incident on the one or more micro-resonators vertically and generate visible light in one or more colors using the infrared light through optical parametric oscillation;
• and
• one or more output couplers configured to couple the visible light in one or more colors from the one or more micro-resonators into free space or one or more waveguides.

A visible light source array comprising:

• a substrate including drive circuits formed thereon;
• and
• a die or a wafer bonded to the drive circuits directly or indirectly, the die or wafer including an array of visible light sources formed thereon, wherein each visible light source in the array of visible light sources is individually addressable by the drive circuits and comprises:
• a vertical cavity formed by a first reflector and a second reflector, the first reflector and the second reflector configured to reflect infrared light;
• an active region in the vertical cavity and configured to emit infrared light;
• a micro-resonator within the vertical cavity and on a layer different from the active region and configured to resonate within the layer, the micro-resonator configured to receive the infrared light incident on the micro-resonator vertically and generate visible light using the infrared light through optical parametric oscillation;
• and
• an output couplers configured to couple the visible light in from the micro-resonator into free space or a waveguide,
• wherein a first micro-resonator in a first visible light source of the visible light source array and a second micro-resonator in a second visible light source of the visible light source array have different sizes, different shapes, different materials, or a combination thereof, and are configured to generate visible light of different colors.